| 摘要 |
A bladder for use on a CMP carrier head having a carrier head housing with a passage extending therethrough is provided. The bladder comprises a flexible diaphragm and first and second annular ribs. Each of the ribs comprises a first end portion configured to be sealingly coupled to the carrier head housing, a second end portion coupled to the diaphragm, and a strain relief member substantially intermediate the first end portion and the second end portion. The bladder also comprises a plenum defined, at least in part, by the first and second annular ribs, wherein the plenum is configured to be fluidly coupled to the passage to permit pressurization of the plenum, and wherein the strain relief member is configured to promote the extension of the first and second annular ribs away from the carrier head housing when the plenum is pressurized. |
