| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method of manufacturing an actuator or the like, which can efficiently cope with an increase in the density or the like in consideration of balance with cost. SOLUTION: The method of manufacturing the actuator includes: a process of forming a switching element circuit group 73 on a substrate 71 for fabrication of a circuit different from the glass substrate 61; and a process of transferring the switching element circuit group 73 to a predetermined position of the glass substrate 61 as the switching element circuit 14, so that individual electrode parts 12 as a plurality of drive means which displace respective diaphragms 22 as a plurality of actuator parts, and a switching element circuit 14 as a driver for selectively supplying electric power to the individual electrode parts 12 are formed on a glass substrate 61 as an actuator-driving substrate. COPYRIGHT: (C)2009,JPO&INPIT
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