发明名称 |
MEMORY DEVICES, STYLUS-SHAPED STRUCTURES, ELECTRONIC APPARATUSES, AND METHODS FOR FABRICATING THE SAME |
摘要 |
An exemplary hollow stylus-shaped structure is disclosed, including a hollow column spacer formed over a base layer and a hollow cone spacer stacked over the hollow column spacer, wherein the hollow cone spacer, the hollow column spacer, and the base layer form a space, and sidewalls of the hollow cone spacer and the hollow column spacer are made of silicon-containing organic or inorganic materials.
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申请公布号 |
US2009191367(A1) |
申请公布日期 |
2009.07.30 |
申请号 |
US20080205804 |
申请日期 |
2008.09.05 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE;POWERCHIP SEMICONDUCTOR CORP.;NANYA TECHNOLOGY CORPORATION;PROMOS TECHNOLOGIES INC.;WINBOND ELECTRONICS CORP. |
发明人 |
CHEN WEI-SU |
分类号 |
B29D22/00;B32B1/08;G02B6/10;G03B27/54;G11B5/187;G21K5/00;H01J1/62;H01L45/00 |
主分类号 |
B29D22/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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