| 摘要 |
PROBLEM TO BE SOLVED: To reduce usage electric energy, obtain a stable gas processability and a high gas processability, and aim the cost-cutting. SOLUTION: Honeycomb structure bodies 4 are arranged at intervals along a direction from an entrance of a duct 1 toward the exit. An upstream side electrode 8 is arranged at the upstream side of the honeycomb structure body 4-1 arranged at the most upstream part among the honeycomb structure bodies 4. A downstream side electrode 9 is arranged at the downstream side of the honeycomb structure body 4-4 arranged at the most downstream part. A rest period is set between the upstream side electrode 8 and the downstream side electrode 9, and a high voltage V is applied intermittently to generate plasma in a spatial gap 12 between a through-hole 4a of the honeycomb structure body 4 and the honeycomb structure body 4. COPYRIGHT: (C)2009,JPO&INPIT
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