| 摘要 |
A micromirror device includes a first member, a second member, joining members joining the first and second members, and a spacer placed between the first and second members. The spacer includes a first surface in surface contact with the first member, a second surface parallel to the first surface and in surface contact with the second member, at least one first through hole, and second through holes, the first and second through holes extending between the first and second surfaces. The joining members include at least one first joining member accommodated in the first through hole and second joining members accommodated in the second through holes. The first through hole restrains movement of the first joining member in any direction parallel to the first and second surfaces. The second through holes allow movement of the second joining members in at least one direction parallel to the first and second surfaces.
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