METHOD FOR MANUFACTURING III METAL NITRIDE SINGLE CRYSTAL

摘要

A template substrate (10A) provided with a substrate main body (1) and a base film (2) is used. The substrate main body has a side surface (1b) and a pair of main surfaces (1a), and the base film is formed on the main surface (1a) and composed of a III metal nitride single crystal. The III metal nitride single crystal (3) is grown at least on one of the main surfaces (1a) of the substrate main body (1) by a liquid phase method. The base film (2) has a protruding figure in planar view. A non-film-formed surface (4) whereupon the base film is not formed surrounds the entire circumference of the base film (2). The III metal nitride single crystal (3) grown from the base film (2) is not brought into contact with the III metal nitride single crystal grown from other base film.