| 摘要 |
PROBLEM TO BE SOLVED: To achieve a micro power generator to operate as a DC generator, by rectifying output power from micro electret mechanical/electrical energy conversion elements by using a mechanical switching mechanism. SOLUTION: Electric power is generated by using the feature, wherein an electret 2 is formed on a base electrode 1, an opposite electrode 3 vibrates to the electret, and an electrostatic capacitance varies therebetween so that a charge quantity to be electrostatically induced into the opposite electrode varies. A mechanical switching function is added to the opposite electrode 3 so that rectification is carried out by mechanical switching synchronized with power generation, resulting in operation as a DC power generator as a whole. In addition, the electret 2, opposite electrode 3 and so on are formed with MEMS (Micro Electromechanical Systems), and therefore it is more useful that the mechanical switching mechanism is also formed in a MEMS process at the same time. COPYRIGHT: (C)2009,JPO&INPIT
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