| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment apparatus and an alignment method for a liquid injection head which can perform highly precise positioning. SOLUTION: The alignment apparatus comprises: a mask 410 having a reference mark 401 by which an alignment mark 22 of an inkjet recording head 220 is positioned; and a bifocal microscope 500 comprising a first optical system 501 having an optical axis L1 and a second optical system 502 having an optical axis L2, wherein the first optical system 501 can focus on the reference mark 401 and the second optical system 502 can focus on the alignment mark 22. The bifocal microscope 500 comprises an optical axis control means 520 for controlling the direction of a reflection plane of a second mirror 509 so that the respective optical axes L1 and L2 are incident into the reference mark 401 and the alignment mark 22 in agreement with each other. COPYRIGHT: (C)2009,JPO&INPIT
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