HIGH PURITY ZINC OXIDE POWDER, HIGH PURITY ZINC OXIDE TARGET AND HIGH PURITY ZINC OXIDE THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide high purity zinc oxide powder and a production method thereof in which impurities, particularly C, Cl, S and Pb impurities, are removed efficiently at a low cost and to provide a target obtained by firing the high purity zinc oxide and a high purity zinc oxide thin film obtained by sputtering the target. SOLUTION: The production method of high purity zinc oxide powder comprises the steps of: subjecting a raw material such as Zn-containing scrap to acid leaching or electrolytic extraction; subjecting the resulting raw material to solvent extraction and activated carbon treatment to remove impurities; neutralizing the solution free of impurities with an alkali solution to obtain zinc hydroxide; and firing the zinc hydroxide to obtain zinc oxide. COPYRIGHT: (C)2009,JPO&INPIT