发明名称 Feldeffekttransistor und Verfahren zur Herstellung eines Feldeffekttransistors
摘要 The transistor has gate-oxides (60, 60`, 60``), and a polycrystalline layer (40) applied on the gate oxide (60). Spacers (51, 53) are conductively connected with the polycrystalline layer, where the spacers are made from polycrystalline silicone. The gate oxide (60) has a thickness in one area below the polycrystalline layer and the gate oxides (60`, 60``) have thickness in areas below the respective spacers (51, 53). The thickness of the gate oxides (60`, 60``) in the latter areas is reduced compared with the thickness of the gate oxide (60) in the former area. An independent claim is also included for a method of manufacturing a field effect transistor.
申请公布号 DE102005028837(B4) 申请公布日期 2009.07.30
申请号 DE20051028837 申请日期 2005.06.25
申请人 ATMEL GERMANY GMBH 发明人 JOODAKI, MOJTABA
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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