METHOD FOR OBTAINING A STRUCTURED MATERIAL WITH THROUGH OPENINGS, IN PARTICULAR NITRIDES OF TYPE III SEMICONDUCTORS STRUCTURED ACCORDING TO PHOTONIC CRYSTAL PATTERNS

摘要

The invention relates to a method for obtaining a plate or a membrane having very small dimensions and forming a photonic crystal. This element is structured according to a predetermined pattern of through openings having a micrometric or lower transverse dimension. The invention also relates to components including such a crystal, and to a system for making such a crystal or component. The method of the invention can be used for obtaining a so-called photonic plate or membrane (20, 306, 406, 506) structured according to a predetermined pattern, and comprises the following steps: structuring (320 to 322) the surface of a substrate (300) by etching according to said pattern; depositing at least one layer of the photonic material forming said plate or membrane, by anisotropic epitaxial growth (324, 424, 524) on the structured surface of said substrate.