| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of laser beam machining of a workpiece in a short time and with a high resolution, by generating ablation plasma on the surface of the workpiece, producing a stress deformation region inside the workpiece, and thereby growing a crack in that region using a shock wave from the plasma. <P>SOLUTION: This is a laser cutting method including a step of generating a laser pulse and a step of making the laser pulse pass through a condensing lens and emitting to the surface periphery of a workpiece, wherein the pulse width of the laser pulse is 100-1,000 femtoseconds, the numerical aperture of the condensing lens is 0.1-0.5, and the pulse energy of the laser pulse passed through the condensing lens is 1-1,000μJ/pulse. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
