FLUID SUPPLY DEVICE AND FLUID SUPPLYING METHOD

摘要

PROBLEM TO BE SOLVED: To prevent damage to a sealing part with particles and precisely supply a fixed quantity of high-pressure fluid even if the fluid to be supplied is a slurry in which particles are dispersed.

SOLUTION: A fluid housing chamber (3) and a driving liquid chamber (4) are provided in a housing (2). The fluid housing chamber (3) and the driving liquid chamber (4) are tightly blocked by a deformable partition wall (5) whose peripheral edge is fixed to the housing (2). A fluid opening (7) is opened at a lower portion of the fluid housing chamber (3). An outlet path (11) is connected to a fluid outlet (7), and an outlet opening/closing valve (13) is provided to the outlet path (11). A device (16) for agitating the inside of a supplying chamber is provided at a lower portion in the fluid housing chamber (3). A driving liquid inlet (18) is opened to the driving liquid chamber (4). The driving liquid inlet (18) is made to communicate with an oil tank (21) via the driving liquid supplying path (20). An oil pump (23) is provided to the driving liquid supplying path (20). A liquid surface detection means (27) is provided to the oil tank (21).

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