| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a sensitive instrument of multi-axial magnetic fields or other fields and a manufacturing method of a sensitive instrument of multi-axial magnetic fields or other fields. <P>SOLUTION: An example of 3-axis magnetic sensor is shown as an example of the integrated 3-axis field sensor. The 3-axis magnetic sensor 20 is equipped with one or two magnetic sensing elements 32 in one side plane of die 30 (X-axis and Y-axis) and a magnetic sensing element 34 outside the plane at opposite side of die 30 (Z-axis). The die 30 is connected to a circuit plate 60 via an interconnection bump 38 and a magnetic sensing element 32 and the circuit plate 60 are connected via a bonding wire 40. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
