| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage capable of mounting and transferring a substrate and then overlaying a mask on the substrate in a good condition. SOLUTION: This device includes: a substrate supporting table 42 having a substrate supporting surface 41 supporting a substrate; a first driving mechanism 44 vertically moving the substrate supporting table 42; a frame 52 which has an upper end surface 51 positioned at the periphery of the substrate supporting surface 41 and has a profile of rectangular form; and a second driving mechanism 54 vertically moving the frame 52. A thin plate-like mask is fixed above the place of moving end of a stage 10. A plurality of first suction holes 58, suction-adsorbing the mask when the frame 52 is moved upward with the second driving mechanism 54 under the mask and the upper end surface 51 is brought into contact with the mask, are provided along a pair of facing sides of the upper end surface 51 of the frame 52. COPYRIGHT: (C)2009,JPO&INPIT |
