PRECISE TEMPERATURE CONTROL EQUIPMENT AND DISTRIBUTED SUPPLY DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent the non-uniformity of temperature distribution in a temperature control object space. SOLUTION: Precise temperature control equipment 100 includes a temperature control device 1 for blowing off temperature object fluid A by carrying out temperature control through a cooling means 3 and a heating means 2; a fluid flow channel 9 for guiding the temperature object fluid A blown from the temperature control device 1 to the temperature control object space 20; and a distributed supply device 10 for supplying the temperature object fluid A to the temperature control object space 20. The distributed supply device includes a convergence merging means 12 for convergence-merging the flow of the temperature object fluid A at the different positions of the fluid flow channel 9, and the convergence-merged flow is distributed at the temperature control object space 20 side. COPYRIGHT: (C)2009,JPO&INPIT