| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element having good dielectric properties by reducing the difference of displacement caused by the polarization of applied voltage, and to provide a method of manufacturing the same and a piezoelectric application device using the same. <P>SOLUTION: The piezoelectric element includes a substrate 6, a metal layer 7 arranged on the substrate 6, a dielectric film 8 arranged on the metal layer 7, a dielectric film 10 arranged over the dielectric film 8 through an adhesive layer 9, and a metal layer 11 arranged on the dielectric film 10. The crystalline orientation tendency of the dielectric film 8 and dielectric film 10 is set to become higher as the films approach the junction surface with the adhesion layer 9. In this arrangement, the difference of voltage-displacement properties caused by the polarization of applied voltage can be reduced as a whole of the piezoelectric element. <P>COPYRIGHT: (C)2009,JPO&INPIT |
