| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor which can improve vibration-proof performance. SOLUTION: The pressure sensor 1 includes: a case 2 which is tubular in shape and is provided with a small-diameter part 2a and a large-diameter part 2b; a metallic diaphragm 3 which is based tubular in shape, is housed within and fixed to the small-diameter part 2a of the case 2, and to which pressure is introduced into the inner part A; a sensor part 4 which is provided on the outer surface of a base part 3a of the metallic diaphragm 3 and has a plurality of strain gauges constituting a bridge circuit to detect the strain of the base part; a connector 6 which is fitted into the large-diameter part 2b of the case 2 and holds a processing substrate 5 which processes a signal output by the sensor part 4; and a flexible cable 7 which connects the sensor part 4 and the processing substrate 5 and is folded and housed into the case 2. The flexible cable 7 is connected to the bridge circuit of the sensor part 4 and is provided with a bent part 7a at the part of the flexible cable 7 which is housed within the large-diameter part 2b of the case 2. COPYRIGHT: (C)2009,JPO&INPIT |
