| 摘要 |
PROBLEM TO BE SOLVED: To provide tantalum oxide having favorable fluidity and forming a high density sintered compact. SOLUTION: The tantalum oxide has a predetermined particle size distribution, wherein when a dry screening test of the tantalum oxide is carried out using eight screens with an opening of 500μm, 425μm, 355μm, 300μm, 250μm, 150μm, 75μm and 45μm and the quantity of tantalum oxide in each of nine intervals of >500μm, 500-425μm, 425-355μm, 355-300μm, 300-250μm, 250-150μm, 150-75μm, 75-45μm and <45μm formed from the eight opening values is determined, the quantity of tantalum oxide in four intervals exceeding 300μm is≤3 mass% of the total quantity of tantalum oxide. COPYRIGHT: (C)2009,JPO&INPIT
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