发明名称 GETTERING LAYER ON SUBSTRATE
摘要 Disclosed herein are devices, methods and systems for implementing gettering layers. Devices including gettering layers can be implemented such that a gettering layer doped with carbon, boron, fluorine or any other appropriate impurity is formed on a semiconductor substrate, a device layer is formed on the gettering layer, and a device region is formed in the device layer having a depth that maintains a distance in the device layer between the gettering layer and the device region.
申请公布号 US2009189159(A1) 申请公布日期 2009.07.30
申请号 US20080020930 申请日期 2008.01.28
申请人 ATMEL CORPORATION 发明人 ENICKS DARWIN;GOOD MARK;CHAFFEE JOHN
分类号 H01L29/04;H01L21/322 主分类号 H01L29/04
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