| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide: a ceramic plasma reactor which generates a plasma by introducing a gas between two unit electrodes and can perform a process efficiently; and a plasma reaction apparatus thereof. <P>SOLUTION: The ceramic plasma reactor has a first electrode 2a and a second electrode 2b, each of which comprises a plate-shaped ceramic dielectric body 4 and a conductive film 3 embedded in the ceramic dielectric body, and which superimpose each other with a predetermined gap. A partition wall plate 9 held with a gap by a holding member 7 is arranged on the face side of the first electrode 2a opposite to a gap between the unit electrodes 2a and 2b, and a gas introducing-circulating portion 21 is formed by the holding member 7 and the partition wall plate 9. Furthermore, through-holes 15 are formed in the first electrode 2a, the gas is circulated from the gas introducing-circulating portion 21 through the through-holes 15 and introduced between the unit electrodes, and the plasma is generated with the application of a voltage between the unit electrodes 2a and 2b with the gap between the unit electrodes 2a and 2b as a discharge portion 11. <P>COPYRIGHT: (C)2009,JPO&INPIT |
