| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaluation method of output waveform for evaluating an output waveform with high accuracy by removing a wavelength measuring device's own distortion. SOLUTION: The evaluation method of output waveform includes determining a differential waveform between a first output waveform obtained by inputting a measuring object output to a waveform measuring device and a second output waveform obtained by inputting a reference pulse to the waveform measuring device, and observing the differential waveform, thereby evaluating the waveform of the measuring object output excluding the own distortion of the waveform measuring device. COPYRIGHT: (C)2009,JPO&INPIT
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