| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance humidity sensor that suppresses increase in thickness of a moisture sensitive film when the moisture sensitive film absorbs moisture, suppresses work in the direction where the capacitance C between a pair of electrodes is decreased, and improves the accuracy of measurement. SOLUTION: In this capacitance humidity sensor, the pair of electrodes 1 and 2 comprise an inner electrode 1 having closed outer periphery and an outer electrode 2 having closed outer periphery, and the moisture sensitive film 3 is formed (closed) between the inner electrode 1 and the outer electrode 2 (in a clearance between the inner electrode 1 and outer electrode 2). COPYRIGHT: (C)2009,JPO&INPIT
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