| 摘要 |
PROBLEM TO BE SOLVED: To relatively easily discover the flaw of a matter to be inspected even when a change in the resonance frequency caused by the flaw of the matter to be inspected is little. SOLUTION: The spectrum amplitude of the frequency spectrum of the matter to be inspected at the time when there is no flaw is subtracted from the spectrum amplitude of the frequency spectrum of the matter to be inspected at every frequency and the subtraction result of those spectrum amplitudes is observed to judge whether the flaw is present in the matter to be inspected. Accordingly, if the flaw is present in the matter to be inspected and the resonance frequency of the matter to be inspected changes from that of a normal product, a large value appears in the difference between the spectrum amplitudes in resonance frequency. Therefore, the flaw of the matter to be inspected can be discovered by observing the difference and detecting the large value. As a result, even when the change in the resonance frequency caused by the flaw of the matter to be inspected is little, the flaw of the matter to be inspected can be relatively easily discovered. COPYRIGHT: (C)2009,JPO&INPIT
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