| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor having high poisoning resistance to a poisoning substance such as silicone, capable of suppressing a change with time of gas sensitivity for a long period. SOLUTION: This gas sensor 100 has a gas sensing film 131 formed of an oxide semiconductor, catalyst particles 133 dispersed on the gas sensing film 131, and a protection layer 140 formed on the gas sensing film 131 and the catalyst particles 133. Among them, the protection layer 140 is constituted of oxide particles 141 having an average particle diameter D of 500 nm or smaller. Assuming that the average particle diameter is D(nm), and that thickness of the protection layer 140 is TH(nm), the protection layer 140 is formed to satisfy an inequality: 20≤TH/D≤500. COPYRIGHT: (C)2009,JPO&INPIT
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