| 摘要 |
PROBLEM TO BE SOLVED: To provide a tabular body cooling apparatus capable of smoothly cooling a heat-treated tabular body, and a heat treatment system having the tabular body cooling apparatus. SOLUTION: A tabular body arranging means 20 has a plurality of blowing means arranging parts 30 provided with blowing means 40 capable of blowing air toward a substrate W, every predetermined space. When putting in and out the substrate W to be cooled, a fork claw 13 of a transfer device 11 is inserted in an operation area 25 formed at the side of the blowing means arranging part 30, and operated. A support pin 23 for supporting the substrate W is therefore lowered by the height portion of the blowing means 40, and a space between the substrate W and the blowing means 40 can be reduced by that portion. The flow velocity of air flowing along the substrate W is thereby increased to enhance the cooling efficiency of the substrate W. COPYRIGHT: (C)2009,JPO&INPIT
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