| 摘要 |
PROBLEM TO BE SOLVED: To provide a method which enables high-speed film formation by casting a solution of a polyimide precursor dissolved in a solvent onto a substrate to improve productivity, and further to enhance productivity of a thinner film formation. SOLUTION: A process for production of a polyimide film includes casting a solution of a polyimide precursor dissolved in a solvent onto a substrate; removing the solvent contained in the solution to peel off a self-supporting film from the substrate; and heating the self-supporting film for imidation, which is characterized by performing cast with a solvent interposed between the substrate and the solution of polyimide precursor to be cast, the solvent having compatibility with the polyimide precursor. COPYRIGHT: (C)2009,JPO&INPIT
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