| 发明名称 |
CHEMICAL DELIVERY SYSTEM HAVING PURGE SYSTEM UTILIZING MULTIPLE PURGE TECHNIQUES |
| 摘要 |
<p>A chemical delivery system (500) which utilizes a purge technique which may utilize a variety of combinations of a medium level vacuum source, a hard vacuum source, and/or a liquid flush system (506). Also a chemical delivery system is disclosed that may be provided with a heater system for heating the chemical delivery system.</p> |
| 申请公布号 |
EP1102947(B1) |
申请公布日期 |
2009.07.29 |
| 申请号 |
EP19990928420 |
申请日期 |
1999.06.04 |
| 申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
GREGG, JOHN, N.;NOAH, CRAIG, M.;JACKSON, ROBERT, M. |
| 分类号 |
F17C13/00;B01J4/00;B67D7/02;B67D7/84;C23C16/44;C23C16/448;C23C16/455;F17C7/00;F17C7/02;F17C9/00;F17C13/02;F17C13/04;F17C13/08;F24H3/00;H01L21/285;H01L21/31 |
主分类号 |
F17C13/00 |
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