发明名称 |
SEPARATION OF SEMICONDUCTOR DEVICES |
摘要 |
<p>A method of fabricating semiconductor devices is disclosed. The method comprises providing a substrate with a plurality of epitaxial layers mounted on the substrate and separating the substrate from the plurality of epitaxial layers while the plurality of epitaxial layers is intact. This preserves the electrical, optical, and mechanical properties of the plurality of epitaxial layers.</p> |
申请公布号 |
SG153672(A1) |
申请公布日期 |
2009.07.29 |
申请号 |
SG20070185671 |
申请日期 |
2007.12.10 |
申请人 |
TINGGI TECHNOLOGIES PRIVATE LIMITED |
发明人 |
XUEJUN KANG;SHU YUAN;JENNY LAM;MING LIN SHI |
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代理机构 |
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