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发明名称
Vaccum coating apparatus
摘要
申请公布号
EP1870487(B1)
申请公布日期
2009.07.29
申请号
EP20060012805
申请日期
2006.06.22
申请人
APPLIED MATERIALS GMBH & CO. KG
发明人
HENRICH, JUERGEN;SAUER, ANDREAS;WURSTER, HARALD;HABERKORN, EDGAR
分类号
C23C14/56
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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