| 摘要 |
A fly eye integrator satisfying the following Expression (1) is used for an illumination system: 4 x f/f > M x DL x NAL...(1) Wherein 4 is a diameter of a circle inscribed to a fly-eye integrator injection end surface; fis a diameter of a circuit inscribed to an end surface of each of lens elements constituting the fly-eye integrator; f is a focal distance of each of lens elements constituting the fly-eye integrator; M is a zoom multiplication ratio of the image formation optical system; DL is field-of-view diameter required for the zoom low multiplication unit of the DL image formation optical system; and NAL is a numerical aperture required for the zoom low multiplication side of the image formation optical system. Thus, it is possible to provide an image measuring device which can prevent insufficient NA from the low multiplication to the high multiplication of zoom and irregularities of the field-of-view. |
