SUBSTRATE PROCESSING UNIT

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing unit rotating a brush with a simple structure. SOLUTION: The brush 20 is coupled to a rotary shaft 45 so that they can integrally rotate through a brush holder 47 and a holder fitting part 48. An impeller 105 consisting of a plurality of blades 104 is coupled to an outer periphery of the holder fitting part 48. The brush 20 and the impeller 105 are coupled so that they can integrally rotate. The brush 20 and the impeller 105 are integrally rotated by making a brush cleaning liquid discharged from first and second nozzles 115 and 116 hit against the blades 104. COPYRIGHT: (C)2009,JPO&INPIT