| 摘要 |
A ceramic multilayer substrate in which nonuniform deformation can be prevented without the addition of a particular process is provided. The ceramic multilayer substrate includes a plurality of laminated ceramic layers and at least one conductor pattern 13 and 14 disposed on at least one of the ceramic layers. The ceramic multilayer substrate has a cavity 12 in at least a first main surface 10a. The ceramic multilayer substrate includes a deformation preventing pattern 15 disposed on at least one of the ceramic layers having an opening forming the cavity 12. The deformation preventing pattern 15 surrounds the entire perimeter of the opening and is formed of the same material as the conductor pattern. |
