Control of critical dimension (CD),申请号EP20030394100-传众专利搜索

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发明名称	Control of critical dimension (CD)
摘要
申请公布号	EP1416330(B1)	申请公布日期	2009.07.29
申请号	EP20030394100	申请日期	2003.10.31
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	PELLEGRINI, JOSEPH;CROW, DAVID
分类号	G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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