ATMOSPHERE PRESSURE PLASMA GENERATION DEVICE FOR MASS PRODUCTION

摘要

An atmosphere pressure plasma generating apparatus for mass production is provided to generate uniform plasma by using an atmospheric temperature control device for controlling atmospheric temperature in an inside of a frame. An atmosphere pressure plasma generating apparatus for mass production(10) includes a power electrode, a grounding electrode, a frame(40), a gas supply unit(50), and a constant gas temperature control unit(60). The power electrode is connected to a DC pulse or an AC power source. The grounding electrode is separated from the power electrode. An injection hole is formed at the grounding electrode in order to receive the plasma gas. The power electrode and the grounding electrode are fixed in the frame. The gas supply unit supplies the gas from the outside of the frame to a gap between the power electrode and the grounding electrode. The constant gas temperature control unit is connected through a distributive tube to the gas supply unit in order to control the temperature of gas.