发明名称 |
PIEZOELECTRIC ACTUATOR UNIT AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
<p>A piezoelectric actuator unit which undergoes less change in the amount of displacement and shows high durability in continuous operation under a high voltage and a high pressure over a long period of time is provided. The piezoelectric actuator unit including a multi-layer piezoelectric element having piezoelectric layers and metal layers with the piezoelectric layers and the metal layers being stacked one on another, and a case which houses the multi-layer piezoelectric element, wherein at least one of the plurality of metal layers is stress relieving layer which consists of a plurality of partial metal layers that are scattered throughout the entire region between two piezoelectric layers which adjoin the partial metal layers in the direction of stacking, and voids, and a peel-off section is formed at least in a part of the interface between the stress relieving layer and the piezoelectric layer that adjoins therewith.</p> |
申请公布号 |
EP2082444(A1) |
申请公布日期 |
2009.07.29 |
申请号 |
EP20060822411 |
申请日期 |
2006.10.20 |
申请人 |
KYOCERA CORPORATION;SIEMENS AKTIENGESELLSCHAFT |
发明人 |
SAKAMOTO, TAKAMI;INAGAKI, MASAHIRO;KASTL, HARALD-JOHANNES;SCHUH, CARSTEN;DOELLGAST, BERNHARD;OCHI, ATSUSHI |
分类号 |
H01L41/083;H01L41/24 |
主分类号 |
H01L41/083 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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