发明名称 CURE APPARATUS FOR FABRICATING OF SEMICONDUCTOR PACKAGE AND METHOD OF FABRIACTING USING THE SAME
摘要 A manufacturing method of a semiconductor package for manufacturing a curing apparatus and semiconductor package using the same is provided to prevent the particle defect generation and prevent the growth of the deformity of the reliability test. A semiconductor package for manufacturing a curing apparatus(100) solidifies the molding material molding the semiconductor chip adhered on the substrate. The semiconductor package for manufacture curing apparatus comprises an oven(101), a guide, a pressure application plate, and a pressure application unit. The substrate in which the semiconductor chip is molded is settled. The pressure application plate is arranged inside guide. The pressure application plate fixes substrate with pressure. The pressure application unit is arranged in the guide upper. The pressure application unit is connected to the pressure application plate.
申请公布号 KR20090082025(A) 申请公布日期 2009.07.29
申请号 KR20080008255 申请日期 2008.01.25
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE, WOONG SUN
分类号 H01L21/324 主分类号 H01L21/324
代理机构 代理人
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