发明名称 |
Silicon seed rod assembly of polycrystalline silicon, method of forming the same, polycrystalline silicon producing apparatus, and method of producing polycrystalline silicon |
摘要 |
<p>A silicon seed rod assembly used for producing polycrystalline silicon by means of a vapor deposition method includes two rod-shape silicon seed rods; and a silicon connection member bridging the silicon seed rods, wherein an opening-end peripheral edge of a through-hole on one side surface of the connection member is sharper than that on the other side surface thereof, and an opening-end peripheral surface on the one side surface thereof is formed into a flat contact surface disposed in a direction perpendicular to a perforation direction of the through-hole, and wherein a upper end portion of the silicon seed rod is inserted into the through-hole so that the contact surface comes into contact with the support surface of the silicon seed rod.
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申请公布号 |
EP2075233(A3) |
申请公布日期 |
2009.07.29 |
申请号 |
EP20080172840 |
申请日期 |
2008.12.23 |
申请人 |
MITSUBISHI MATERIALS CORPORATION |
发明人 |
TEBAKARI, MASAYUKI;HATAKEYAMA, NAOKI |
分类号 |
C01B33/035 |
主分类号 |
C01B33/035 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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