Microelectromechanical system tunable capacitor

摘要

A varactor (1) of the invention comprises a substrate (2) on which an arched movable capacitance electrode (3) is supported at its ends by the contact with the substrate (2) or topographical features on the substrate, and there is a fixed capacitance electrode (4) on the substrate (2) under the movable electrode (3). Application of electrostatic forces causes the electrode (3) to deflect so that the arch shape is lowered and narrowed until it is fully in contact with the fixed electrode (4). There may be an additional pair of resilient supports (5) supporting the movable capacitance electrode (3) mid-way along its length. In this case, the supports (5) apply an additional level of control over the deflection of the movable capacitance electrode (3) towards the fixed capacitance electrode 4.