发明名称 |
OPTICAL SCANNING DEVICE |
摘要 |
<p>An optical scanning device of the invention includes: a substrate main body (20); two cantilever beam portions (19) which protrude from both-side portions of one side of the substrate main body (20); a mirror portion (13) whose both-sides are supported by torsion bar portions (12); a drive source (11) which causes the substrate main body (20) to oscillate; and a light source which projects light onto the mirror portion (13), where the mirror portion (13) resonates and vibrates in accordance with a vibration imparted to a substrate (10), and a direction of reflection light from the light projected onto the mirror portion (13) from the light source changes in accordance with the vibration of the mirror portion (13), and where a fixed end portion (21) is fixed to a supporting component (16), and the drive source (11) is provided on a portion of the substrate main body (20).</p> |
申请公布号 |
EP2083309(A1) |
申请公布日期 |
2009.07.29 |
申请号 |
EP20070828445 |
申请日期 |
2007.09.26 |
申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE |
发明人 |
AKEDO, JUN;SATO, HARUMICHI;PARK, JAEHYUK |
分类号 |
G02B26/10;B81B3/00;G02B26/08 |
主分类号 |
G02B26/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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