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发明名称
DEPOSITION APPARATUS FOR THE FORMATION OF POLYCRYSTALLINE MATERIALS ON MOBILE SUBSTRATES
摘要
申请公布号
EP1937867(A4)
申请公布日期
2009.07.29
申请号
EP20060800301
申请日期
2006.07.25
申请人
发明人
分类号
C23C16/00;C23C16/24;C23C16/54
主分类号
C23C16/00
代理机构
代理人
主权项
地址
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