GAS ANALYZER AND METHOD OF GAS ANALYSIS

摘要

The present invention provides a gas analyzer that can be miniaturized and detect a wide variety of gases with high sensitivity, and a method of gas analysis. A separation column 16 is configured so as to pass a sample gas together with a carrier gas through the inside thereof. A surface acoustic wave device 17 has a base material 21 with an annularly continuous annular surface formed of at least a part of a shperical surface; a surface acoustic wave generating means 22 capable of generating a surface acoustic wave that propagates along the annular surface; and a plurality of reaction parts 23 provided along the annular surface so as to change a predetermined physical quantity of the surface acoustic wave in response to the components of the sample gas. The surface acoustic wave device 17 is arranged so that the sample gas passing through the separation column 16 is reacted with the reaction parts 23. The measuring part 18 can measure a physical quantity of the surface acoustic wave propagating along the annular surface, and the components of the sample gas can be analyzed on the basis of the measured physical quantity.