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发明名称
摘要
申请公布号
JP4302505(B2)
申请公布日期
2009.07.29
申请号
JP20030424569
申请日期
2003.12.22
申请人
发明人
分类号
H01L21/3205;H01L23/52
主分类号
H01L21/3205
代理机构
代理人
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