METHOD AND APPARATUS FOR IMPLEMENTING A UNIVERSAL COORDINATE SYSTEM FOR METROLOGY DATA

摘要

A method includes receiving a metrology report (260) including metrology data collected by a metrology tool (210), position data associated with the metrology data, and context data associated with the metrology tool (210). A First coordinate system employed by the metrology tool (210) is determined based on the context data. The position data is transformed from the first coordinate system to a second coordinate system to generate transformed position data. The transformed position data is associated with the metrology data.