发明名称 Method for forming a variable capacitor
摘要 A method for forming a variable capacitor including a conductive strip covering the inside of a cavity, and a flexible conductive membrane placed above the cavity, the cavity being formed according to the steps of: forming a recess in the substrate; placing a malleable material in the recess; having a stamp bear against the substrate at the level of the recess to give the upper part of the malleable material a desired shape; hardening the malleable material; and removing the stamp.
申请公布号 US7565725(B2) 申请公布日期 2009.07.28
申请号 US20060512731 申请日期 2006.08.30
申请人 STMICROEECTRONICS S.A.;COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 BOUCHE GUILLAUME;CASSET FABRICE;ANCEY PASCAL
分类号 H01G7/00 主分类号 H01G7/00
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