发明名称 |
Method for evaluating semiconductor device |
摘要 |
The present invention provides a method for evaluating an intended element or a parameter. In addition, the invention provides an evaluation method for obtaining a more precise result rapidly. According to the invention, a plurality of evaluation circuits are formed over the same substrate, and while simultaneously operating the plurality of evaluation circuits, an output of one evaluation circuit selected by a selection circuit that is formed over the substrate is arbitrarily evaluated.
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申请公布号 |
US7567882(B2) |
申请公布日期 |
2009.07.28 |
申请号 |
US20070758066 |
申请日期 |
2007.06.05 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
ASANO ETSUKO;KATO KIYOSHI;SHIONOIRI YUTAKA;HAYAKAWA MASAHIKO |
分类号 |
G01R31/00;G01R31/26;G01R31/317;G01R31/3187;G06F19/00 |
主分类号 |
G01R31/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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