发明名称 Support device with discrete getter material microelectronic devices
摘要 The specification teaches a system for manufacturing microelectronic, microoptoelectronic or micromechanical devices (microdevices) in which a contaminant absorption layer improves the life and operation of the microdevice. In an embodiment, a system for manufacturing the devices includes efficiently integrating a getter material in multiple microdevices.
申请公布号 US7566957(B2) 申请公布日期 2009.07.28
申请号 US20070982279 申请日期 2007.10.31
申请人 SAES GETTERS S.P.A. 发明人 AMIOTTI MARCO
分类号 G02B26/08;H01L23/20;B01D53/14;B01D53/28;B01J20/02;B01J20/04;B81B3/00;B81B7/00;B81C1/00;C23C14/04;C23C16/04;H01L21/00;H01L21/02;H01L21/68;H01L23/26 主分类号 G02B26/08
代理机构 代理人
主权项
地址