发明名称 Semiconductor device and method for manufacturing the same
摘要 An object of the present invention is to provide a semiconductor device which has flexibility and resistance to a physical change such as bending and a method for manufacturing the semiconductor device. A semiconductor device of the present invention includes a plurality of transistors provided over a flexible substrate, each of which has a semiconductor film, a gate electrode provided over the semiconductor film with a gate insulating film therebetween, and an interlayer insulating film provided to cover the gate electrode, and a bending portion provided between the plurality of transistors, in which the bending portion is provided by filling an opening formed in the interlayer insulating film with a material having a lower elastic modulus, a material having a lower glass transition point, or a material having a higher plasticity than that of the interlayer insulating film.
申请公布号 US7566633(B2) 申请公布日期 2009.07.28
申请号 US20060354810 申请日期 2006.02.16
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 KOYAMA JUN;DAIRIKI KOJI;OKAZAKI SUSUMU;MORIYA YOSHITAKA;YAMAZAKI SHUNPEI
分类号 H01L21/46 主分类号 H01L21/46
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