发明名称 |
Print head with thin membrane |
摘要 |
A microfabricated device and method for forming a microfabricated device are described. A thin membrane including silicon is formed on a silicon body by bonding a silicon-on-insulator substrate to a silicon substrate. The handle and insulator layers of the silicon-on-insulator substrate are removed, leaving a thin membrane of silicon bonded to a silicon body such that no intervening layer of insulator material remains between the membrane and the body. A piezoelectric layer is bonded to the membrane.
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申请公布号 |
US7566118(B2) |
申请公布日期 |
2009.07.28 |
申请号 |
US20040962378 |
申请日期 |
2004.10.08 |
申请人 |
FUJIFILM DIMATIX, INC. |
发明人 |
BIBL ANDREAS;CHEN ZHENFANG;BIRKMEYER JEFFREY |
分类号 |
B41J2/045;B41J2/14;B41J2/155;B41J2/16;G11B5/127;H02N2/00 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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