A IMPRINT MOLD FOR FORMED MOLD-RELEASING FILM AND METHOD FOR FORMING THEREOF

摘要

A release film formation method of an imprint mold and the imprint mold in which the release film is formed are provided to solve the abrasion of the damage of the molded product by the adhesion problem with the mold and polymer and mold are easily canceled. A method for forming the release film in the imprint mold is as follows. The base layer of an imprint mold(100) is processed with plasma etching and the beach berms of the nano particle are formed on the imprint mold surface. Nano-size air bubbles of the capillary tube shape are formed while growing the carbon nano-tube(200) on the top of single tube. A lubricating oil(300) for forming the release film inside air bubbles is filled.